Application Scheme of LDI Exposure Machine Precision Marble Linear Motor

Industry: Semiconductor

Equipment name: LDI exposure machine

Industrial application: outer layer of circuit board, flexible circuit board, etc

Operating environment: thermostatic workshop

Structure: marble gantry

Scheme features: Intelligent coreless linear motor is adopted, which can realize the speed fluctuation up to one thousandth of the moving shaft; Motion control improves the stability of the whole equipment; Professional assembly and design teams ensure the steady progress of the scheme; Laser interferometer provides motion accuracy report.